中文名稱：三（二甲胺基）硅烷
CAS號：15112-89-7
中文別名：三(二甲氨基)硅烷;三(二甲胺基)硅烷;三（二甲胺基）硅烷;三(二甲基氨基)硅烷;三(二甲胺)硅
英文名稱：Silanetriamine,N,N,N',N',N'',N''-hexamethyl-
英文別名：Silanetriamine,N,N,N',N',N'',N''-hexamethyl-;TRIS(DIMETHYLAMINO)SILANE;n,n,n;Tris(dimethylamido)silane;(Me2N)3SiH;N,N,N′,N′,N′′, N′′-Hexamethylsilanetriamine;N,N,N′,N′,N′′,N′′-Hexamethylsilanetriamine;TDMAS;LS 1460;Tris(dimethylamino)silane;Tri(dimethylamino)silane;3DMAS : [(CH3)2N]3SiH;Tris(dimethyamino)silane;TRIS(DIMETHYLAMINO)SILANE 99+%;TRIS(DIMETHYLAMINO)SILANE, 99.9+%
EINECS:239-165-0
分子式：C6H19N3SI
分子量：161.32